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MKS Instruments AS02500-38-1 Interlock Module PCB CDN497 AMAT 0190-87835 Working Made in Japan This YaskawaMKS Instruments AS02500 38 1 Interlock Module PCB CDN497 AMAT 0190 87835 Working Part No: AS02500 38 1 Model No: CDN497 CDN500R 38 1 AMAT Applied Materials Part No: 0190 87835 DPS CHAMBER INTERLOCK MODULE This is working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 10"x 10"x 10" @ 4lbs. Shipping Terms: